MEMS-actuatedmetasurfaceAlvarezlens
ZheyiHan,ShaneColburn,ArkaMajumdarKarlF.B?hringer
（DepartmentofElectricalandComputerEngineering,UniversityofWashington,Seattle,Washington,,USA
InstituteforNano-EngineeredSystems,UniversityofWashington,Seattle,Washington,,USA
DepartmentofBioengineering,UniversityofWashington,Seattle,Washington,,USA）
MicrosystemsNanoengineering:volume6,()
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